SPECTROSCOPY LETTERS, vol.51, no.6, pp.297-301, 2018 (SCI-Expanded)
Thickness and composition of thin films can be measured with X- and gamma-rays. In this work, thickness and composition of vanadium pentoxide thin films are investigated by energy dispersive and wavelength dispersive X-ray fluorescence systems. Also, the surface analysis of vanadium pentoxide thin films irradiated with Rhodium K X-rays and 59.54keV gamma-rays emitted from 100mCi and 5Ci Americium-241 radioactive sources is performed by scanning electron microscope. It is observed that X- and gamma-rays are destructive for vanadium pentoxide thin films. Also, the composition of vanadium pentoxide thin films changes by irradiation with X- and gamma-rays.