International Conference on Advances in Engineering, Architecture, Science and Technology (ICA-EAST 2021), Erzurum, Türkiye, 15 - 17 Kasım 2021, ss.70-74, (Tam Metin Bildiri)
In this study, zinc oxide (ZnO) thin films are deposited on a silicon substrate by using Successive Ionic Layer
Adsorption and Reaction (SILAR) and spin coating methods. Scanning electron microscopy (SEM) and X-ray
diffraction (XRD) measurements are made to examine the surface morphologies and crystal structures of the
obtained samples, respectively, and photoluminescence (PL) measurements are taken to investigate optical
properties of the films. From the SEM measurements, it is observed that the surfaces are homogeneous and ZnO
nano-rods are formed on the surfaces and the presence of ZnO peaks is confirmed from the XRD measurements.
From the PL measurements, it is observed that the samples can emit light around 380 nm. The measurements
reveal that the thin films deposited by spin coating method have better characteristics than deposited by SILAR
method.
Keywords. Zinc oxide, SILAR, spin coating